Coverart for item
The Resource Micro-nano technology XIII : selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China, edited by Xiaohao Wang, (electronic resource)

Micro-nano technology XIII : selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China, edited by Xiaohao Wang, (electronic resource)

Label
Micro-nano technology XIII : selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China
Title
Micro-nano technology XIII
Title remainder
selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China
Statement of responsibility
edited by Xiaohao Wang
Creator
Contributor
Subject
Genre
Language
eng
Summary
These 81 papers, all written by Chinese researchers, are grouped into 8 chapters: Micro/Nano Transducer/Acutar/Robot, Microfluidic Devices and Systems, Micro/ Nano Fabrication and Measurement Technologies, Microfluidics and nano fluids, Nano Material Research/Nanotube/Nanowire Devices, MEMS/NENS and Applications, Nanometer Biological / Nano Medicine and Packaging Technology. This work offers an excellent overview of current research on MEMS and nano-technology in China. It will be invaluable to researchers, graduate students and engineers who work in the fields of MEMS and nano technology. Re
Member of
Dewey number
620.5
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://bibfra.me/vocab/lite/organizationDate
2011 :
http://bibfra.me/vocab/lite/organizationName
Zhongguo wei mi na mi ji shu xue hui
http://library.link/vocab/relatedWorkOrContributorName
Wang, Xiaohao
Series statement
Key engineering materials,
Series volume
v. 503
http://library.link/vocab/subjectName
  • Nanotechnology
  • Microtechnology
Label
Micro-nano technology XIII : selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China, edited by Xiaohao Wang, (electronic resource)
Instantiates
Publication
Antecedent source
unknown
Bibliography note
Includes bibliographical references and indexes
Color
multicolored
Contents
  • Micro-Nano Technology XIII; Preface; Table of Contents; Chapter 1: Micro/Nano Transducer/Actuator/Robot; The Out-Rotator of Spin Traveling Wave Pump on Magnetic Fluid; A Monolithic Integrated Pressure Sensor; A High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-Gyroscope; Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports; Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror; Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si3N4 Multilayered Composite Membrane
  • New Isolation Optimization Method of RF MEMS Capacitive SwitchesDesign, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors; MEMS Grating with Interdigitated-Comb Structure; Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor; Micro-Machined Electrochemical Seismic Sensors with Interdigital Electrodes; Optimal Design of Micro Plastic Heat Radiator; A Miniaturized Piezoelectric Wind Flutter Generator; Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMS
  • A Flush-Mounted Resonant Ice Detection Sensor with High SensitivitySimulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers; Simulation of Characteristic of a Thermoelectric Power Sensor Based on MEMS Technology; Phase Transition Characterization Dependent on Temperature and DC Electric Field for (Pb, La) (Zr, Ti)O3 Antiferroelectric Thick Films; Heating Carve Technique for Polymer Microfluidic Microchannel; Structure Design of a Novel Micromachinined Tuning Fork Gyroscope with High Robustness; MEMS Bionic Vector Hydrophone
  • Vibration Characteristic Analysis of V-Shaped Electrothermal MicroactuatorDesign and Analysis of a Monolithic 3-Axis Micro-Accelerometer; An Interface for Low-Q Micromachined Gyroscope; A High-Performance Closed-Loop Fourth-Order Sigma-Delta Micro-Machined Accelerometer; Research of Coupling Structure between Photonic Crystal Waveguide and Dielectric Taper Waveguide; A Simple Method for Depositing DNA on the Mica; A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution
  • Analysis of Polarization-Maintaining Waveguide Used in Resonance Integrated Optical GyroAnalysis and Improvement of a 3 Axis Accelerometer; A 19 Element Hexagonal Actuator Arrangement Continuous Face-Sheet MEMS Deformable Mirror; Quadrature Error and Offset Error Suppression Methods for Micro-Gyroscopes; Closed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined Gyroscope; Design and Simulation of Multi-Microchannel for Thermal Wind Sensor; Study of High Sensitivity Sensor Based on the Principle of Photoionization
Control code
ocn828105902
Dimensions
unknown
Extent
1 online resource
File format
unknown
Form of item
online
Isbn
9783038136897
Level of compression
unknown
Note
eBooks on EBSCOhost
Other physical details
illustrations
Quality assurance targets
not applicable
Reformatting quality
unknown
Sound
unknown sound
Specific material designation
remote
System control number
(OCoLC)828105902
Label
Micro-nano technology XIII : selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China, edited by Xiaohao Wang, (electronic resource)
Publication
Antecedent source
unknown
Bibliography note
Includes bibliographical references and indexes
Color
multicolored
Contents
  • Micro-Nano Technology XIII; Preface; Table of Contents; Chapter 1: Micro/Nano Transducer/Actuator/Robot; The Out-Rotator of Spin Traveling Wave Pump on Magnetic Fluid; A Monolithic Integrated Pressure Sensor; A High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-Gyroscope; Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports; Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror; Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si3N4 Multilayered Composite Membrane
  • New Isolation Optimization Method of RF MEMS Capacitive SwitchesDesign, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors; MEMS Grating with Interdigitated-Comb Structure; Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor; Micro-Machined Electrochemical Seismic Sensors with Interdigital Electrodes; Optimal Design of Micro Plastic Heat Radiator; A Miniaturized Piezoelectric Wind Flutter Generator; Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMS
  • A Flush-Mounted Resonant Ice Detection Sensor with High SensitivitySimulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers; Simulation of Characteristic of a Thermoelectric Power Sensor Based on MEMS Technology; Phase Transition Characterization Dependent on Temperature and DC Electric Field for (Pb, La) (Zr, Ti)O3 Antiferroelectric Thick Films; Heating Carve Technique for Polymer Microfluidic Microchannel; Structure Design of a Novel Micromachinined Tuning Fork Gyroscope with High Robustness; MEMS Bionic Vector Hydrophone
  • Vibration Characteristic Analysis of V-Shaped Electrothermal MicroactuatorDesign and Analysis of a Monolithic 3-Axis Micro-Accelerometer; An Interface for Low-Q Micromachined Gyroscope; A High-Performance Closed-Loop Fourth-Order Sigma-Delta Micro-Machined Accelerometer; Research of Coupling Structure between Photonic Crystal Waveguide and Dielectric Taper Waveguide; A Simple Method for Depositing DNA on the Mica; A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution
  • Analysis of Polarization-Maintaining Waveguide Used in Resonance Integrated Optical GyroAnalysis and Improvement of a 3 Axis Accelerometer; A 19 Element Hexagonal Actuator Arrangement Continuous Face-Sheet MEMS Deformable Mirror; Quadrature Error and Offset Error Suppression Methods for Micro-Gyroscopes; Closed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined Gyroscope; Design and Simulation of Multi-Microchannel for Thermal Wind Sensor; Study of High Sensitivity Sensor Based on the Principle of Photoionization
Control code
ocn828105902
Dimensions
unknown
Extent
1 online resource
File format
unknown
Form of item
online
Isbn
9783038136897
Level of compression
unknown
Note
eBooks on EBSCOhost
Other physical details
illustrations
Quality assurance targets
not applicable
Reformatting quality
unknown
Sound
unknown sound
Specific material designation
remote
System control number
(OCoLC)828105902

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